Chemical Vapor Deposition Coating Furnace With TiCL4,AICL3 Precursors And Process Gases

Chemical Vapor Deposition Coating Furnace with TiCL4,AICL3 precursors and process gases

CVD Coating Machine is a state-of-the-art vacuum coating technique, which utilizes chemical deposition equipment to deposit a thin layer of material onto the surface of a substrate. This type of surface coating apparatus offers a wide range of coating speeds, from 0.1 to 2.0m/min. It also provides a precise and uniform coating pressure, with a pressure stability of -±2mbar. The heating system is electric heating, which ensures a stable substrate temperature for optimal coating results. The whole process is controlled by a PLC system, which ensures precise coating thickness and uniformity. This CVD Coating Machine is ideal for a variety of CVD coating applications.

The differences between ALD and CVD processes:

ALD is a chemical vapour deposition technique that is based on a self-limiting surface reaction

Deposit films one atomic layer at a time

Require lower temperatures

Useful in the production of semiconductors and integrated circuits, thin film solar cells,and in the production of high performance coatings for optical components.

CVD is a widely used material processing technology in which thin films are formed on a heated substrate via a chemical reaction of gas-phase precursors.

Deposit films with a wider range of thickness

Require higher temperatures

Used in fields like optics,microelectronics, and material science, where it helps in the fabrication of thin films and coatings for electronic devices, deposition of coatings on lenses and mirrors, and the synthesis of various materials.

• Design standards

The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.

• Installation pre-test and pre-acceptance

The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.

• Disassembly and transportation

The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.

• Customer site installation and commissioning

The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).

• Final acceptance

After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.

• Training

Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.

• Technical data delivery

To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:

1. Equipment installation layout

2. User manual

3. Spare parts list

4. Electrical drawings

5.  Component manual

FAQ

Are you a factory or trading company?

Q: Are you a factory or trading company?

A:We are China leading high-temperature vacuum furnace manufacturer with over 10 years’ experience.

Do you have customization or OEM service?

Q: Do you have customization or OEM service??

A:Yes,we have powerful R&D team and high-tech equipment.So we can not only supply the regular model,but also the customizable furnace as the repuirment of our clients.

What's your advantage?

Q:What's your advantage?

A:

l Quick response to your enquiry

l High quality control

l Stable supply chain

l Timely delivery

l Excellent after-sales service

       Zhuzhou Ruideer Intelligent Equipment Co., Ltd. is a manufacturer of powder metallurgy solutions for the whole industry chain. It integrates process development, production, sales and coating services of sintering furnace, PVD coating furnace and CVD coating furnace. Ruideer has standardized workshops and office buildings, covering an area of more than 19,000 square meters, with more than 170 employees. Ruideer’s productivity reaches 120 sets of pressurized sintering furnaces per year, 500,000 pieces of PVD coating per month, and 250,000 pieces of CVD coating per month.

In the past years, Ruideer has been rated as a national high-tech enterprise, a national-level Specialized and Sophisticated enterprise (appointed as a national key little giant enterprise in 2022), a little giant enterprise in Hunan Province, and a single champion of pressure sintering furnace in Hunan Province, and gained 85 intellectual property authorizations.

Nearly 400 sets of degreasing gas pressure sintering furnaces and 180 sets of degreasing vacuum pressure sintering furnaces have been produced. In order to continuously meet and exceed customer needs, Ruideer provides customers with "targeted application, key development, and tailor-made" characteristic services. The products are sold both at home and abroad (US, Russia, EU, Japan, Ukraine, South Korea, Vietnam and other countries), providing 24-hour response services to domestic customers. Ruideer's products have been widely used in the cemented carbide, ceramic, MIM stainless steel, semiconductor industry.

In line with the enterprise spirit of "quality-oriented, continuous innovation, service satisfaction, unity and hard work, and common development", Ruideer is guided by market demand and business development, supported by key technologies, closely following customer needs, and is committed to serving customers with stable and reliable technical products and contribute to the application in the field of powder metallurgy!

Our standard sintering furnace model include (but are not limited to):

• Gas pressure sinteing integrated furnace（1MPa/2MPa/6MPa/10MPa)
• Debinding vacuum sintering integrated furnace
• MIM stainless steel sintering furnace
• Silicon nitride sintering furnace
• Silicon carbide sintering furnace
• Metal sintering furnace (Mo/W heater)
• Vacuum brazing furnace
• CVD coating furnace