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Titanium Target

Titanium Target

Country/Region china

Company Baoji Oruixuan Titanium Industry Co., Ltd

Categories Custom Titanium Parts

Update 2020-03-24 22:28:44

ICP License Issued by the Chinese Ministry

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Titanium products


Titanium Target

Product name

Titanium and titanium alloy target




Titanium round target: Technical conditions: Comply with GB / T2695-1996, ASTMB348-97

Titanium plate target: Technical conditions: Comply with GB / T3621-94, ASTM B265-93


Round target: common specifications: 60/65/95/100 * 30/32/40 / 45mm

Board target: (8-25) mm * (150-300) mm * (1000-2500) mm

Tube target: 70mm * 7mm / 10mm


Turning light, thread can be added


Light weight, excellent corrosion resistance, corrosion resistance, high strength, good heat resistance, good ductility, non-toxicity, non-magnetic, excellent mechanical strength, etc.


Annealed state (M) Hot-worked state (R) Cold-worked state (Y) (annealed, supersonic flaw detection available)


For semiconductor separation devices, flat panel displays, storage electrode films, sputter coating, surface coating of workpieces, glass coating industry

Overview and material requirements of titanium targets


Purity is one of the main performance indicators of the target, because the purity of the target has a great influence on the performance of the film. However, in practical applications, the purity requirements of the target materials are also different. For example, with the rapid development of the microelectronics industry, the size of silicon wafers has grown from 6 ”, 8” to 12 ”, and the wiring width has been reduced from 0.5um to 0.25um, 0.18um, or even 0.13um. Previously, the target purity was 99.995%. Can meet the process requirements of 0.35umIC, and the preparation of 0.18um lines requires a target purity of 99.999% or even 99.9999%.

Impurity content

Impurities in the target solid and oxygen and water vapor in the pores are the main sources of pollution of the deposited film. Different applications of target materials have different requirements for different impurity contents. For example, pure aluminum and aluminum alloy targets used in the semiconductor industry have special requirements for the content of alkali metals and the content of ra

Product Tags:

diode pump laser cutting


fiber laser cutting parameters

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